Chin. J. Semicond. > 2005, Volume 26 > Issue 6 > 1169-1172
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蓝宝石衬底上单晶InN外延膜的RF-MBE生长

肖红领 , 王晓亮 , 张南红 , 王军喜 , 刘宏新 , 韩勤 , 曾一平 and 李晋闽

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Key words: RF-MBE, 氮化铟, DCXRD, AFM

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    Received: 19 August 2015 Revised: Online: Published: 01 June 2005

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      Article Navigation >  Journal of Semiconductors  > 2005  >  26(6): 1169-1172
      肖红领, 王晓亮, 张南红, 王军喜, 刘宏新, 韩勤, 曾一平, 李晋闽. 蓝宝石衬底上单晶InN外延膜的RF-MBE生长[J]. 半导体学报(英文版), 2005, 26(6): 1169-1172.
      Citation:
      肖红领, 王晓亮, 张南红, 王军喜, 刘宏新, 韩勤, 曾一平, 李晋闽. 蓝宝石衬底上单晶InN外延膜的RF-MBE生长[J]. 半导体学报(英文版), 2005, 26(6): 1169-1172.
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      • Received Date: 2015-08-19

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