A GaAs-Based MOEMS Tunable RCE Photodetector with Single Cantilever Beam

Zhou Zhen , Han Qin , Du Yun , Yang Xiaohong , Wu Ronghan , Huang Yongqing and and Ren Xiaomin

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Key words: GaAs, MOEMS, RCE, photodetector, tuning, single cantilever beam

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Received: 19 August 2015 Revised: Online: Published: 01 June 2005

Article Navigation > Journal of Semiconductors > 2005 > 26(6): 1087-1093

Zhou Zhen, Han Qin, Du Yun, Yang Xiaohong, Wu Ronghan, Huang Yongqing, and Ren Xiaomin. A GaAs-Based MOEMS Tunable RCE Photodetector with Single Cantilever Beam[J]. 半导体学报(英文版), 2005, 26(6): 1087-1093.

Citation:

Zhou Zhen, Han Qin, Du Yun, Yang Xiaohong, Wu Ronghan, Huang Yongqing, and Ren Xiaomin. A GaAs-Based MOEMS Tunable RCE Photodetector with Single Cantilever Beam[J]. 半导体学报(英文版), 2005, 26(6): 1087-1093.