Chin. J. Semicond. > 2005, Volume 26 > Issue 6 > 1245-1249
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灌封胶封装对高量程MEMS加速度计动态性能的影响

蒋玉齐 , 程迎军 , 张鲲 , 李昕欣 and 罗乐

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Key words: 高量程MEMS加速度计, 灌封, 弹性模量, 有限元分析

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    Received: 19 August 2015 Revised: Online: Published: 01 June 2005

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      Article Navigation >  Journal of Semiconductors  > 2005  >  26(6): 1245-1249
      蒋玉齐, 程迎军, 张鲲, 李昕欣, 罗乐. 灌封胶封装对高量程MEMS加速度计动态性能的影响[J]. 半导体学报(英文版), 2005, 26(6): 1245-1249.
      Citation:
      蒋玉齐, 程迎军, 张鲲, 李昕欣, 罗乐. 灌封胶封装对高量程MEMS加速度计动态性能的影响[J]. 半导体学报(英文版), 2005, 26(6): 1245-1249.
      shu

      • Received Date: 2015-08-19

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