Chin. J. Semicond. > 2005, Volume 26 > Issue 6 > 1197-1202

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Ni(Zr)Si薄膜热稳定性及其肖特基势垒二极管的电学特性

黄伟 , 卢建政 , 张利春 , 高玉芝 and 金海岩

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Key words: Ni(Zr)Si热稳定性X射线衍射Raman光谱肖特基二极管

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    Received: 19 August 2015 Revised: Online: Published: 01 June 2005

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      黄伟, 卢建政, 张利春, 高玉芝, 金海岩. Ni(Zr)Si薄膜热稳定性及其肖特基势垒二极管的电学特性[J]. 半导体学报(英文版), 2005, 26(6): 1197-1202.
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      黄伟, 卢建政, 张利春, 高玉芝, 金海岩. Ni(Zr)Si薄膜热稳定性及其肖特基势垒二极管的电学特性[J]. 半导体学报(英文版), 2005, 26(6): 1197-1202.

      • Received Date: 2015-08-19

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