Chin. J. Semicond. > 1986, Volume 7 > Issue 6 > 582-588
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三维CMOS集成电路工艺及其性能研究

钱佩信 , 马腾阁 , 山静 , 赵寅鹏 , 陈必贤 and 林惠旺

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    Received: 20 August 2015 Revised: Online: Published: 01 June 1986

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      Article Navigation >  Journal of Semiconductors  > 1986  >  7(6): 582-588
      钱佩信, 马腾阁, 山静, 赵寅鹏, 陈必贤, 林惠旺. 三维CMOS集成电路工艺及其性能研究[J]. 半导体学报(英文版), 1986, 7(6): 582-588.
      Citation:
      钱佩信, 马腾阁, 山静, 赵寅鹏, 陈必贤, 林惠旺. 三维CMOS集成电路工艺及其性能研究[J]. 半导体学报(英文版), 1986, 7(6): 582-588.
      shu

      • Received Date: 2015-08-20

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