| Citation: |
Yuan Yujie, Hou Guofu, Zhang Jianjun, Xue Junming, Zhao Ying, Geng Xinhua. The Microstructure Evolution of Intrinsic Microcrystalline Silicon Films and Its Influence on the Photovoltaic Performance of Thin-Film Silicon Solar Cells[J]. Journal of Semiconductors, 2008, 29(11): 2125-2129.
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Yuan Y J, Hou G F, Zhang J J, Xue J M, Zhao Y, Geng X H. The Microstructure Evolution of Intrinsic Microcrystalline Silicon Films and Its Influence on the Photovoltaic Performance of Thin-Film Silicon Solar Cells[J]. J. Semicond., 2008, 29(11): 2125.
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The Microstructure Evolution of Intrinsic Microcrystalline Silicon Films and Its Influence on the Photovoltaic Performance of Thin-Film Silicon Solar Cells
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Abstract
Hydrogenated microcrystalline silicon (μc-Si:H) intrinsic films and solar cells are prepared by plasma enhanced chemical vapor deposition (PECVD) with various hydrogen dilution ratios.The influence of hydrogen dilution ratios on electrical characteristics is investigated to study the phase transition from amorphous to microcrystalline silicon.During the deposition process,the optical emission spectroscopy (OES) from plasma is recorded and compared with the Raman spectra of the films,by which the microstructure evolution of different H2 dilution ratios and its influence on the performance of μc-Si:H n-i-p solar cells is investigated. -
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