Chin. J. Semicond. > 2004, Volume 25 > Issue 3 > 241-246

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无机络合溶胶-凝胶法制备多孔ZnO薄膜(英文)

杨立荣 , 靳正国 , 步邵静 and 程志捷

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Key words: 多孔ZnO薄膜, 无机络合溶胶-凝胶法, 孔径分布, 性能

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    Received: 19 August 2015 Revised: Online: Published: 01 March 2004

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      Article Navigation >  Journal of Semiconductors  > 2004  >  25(3): 241-246
      杨立荣, 靳正国, 步邵静, 程志捷. 无机络合溶胶-凝胶法制备多孔ZnO薄膜(英文)[J]. 半导体学报(英文版), 2004, 25(3): 241-246.
      Citation:
      杨立荣, 靳正国, 步邵静, 程志捷. 无机络合溶胶-凝胶法制备多孔ZnO薄膜(英文)[J]. 半导体学报(英文版), 2004, 25(3): 241-246.
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      • Received Date: 2015-08-19

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