Chin. J. Semicond. > 1996, Volume 17 > Issue 4 > 313-317
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真空微电子器件的栅极制造技术

朱长纯，关辉，李天英

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    Received: 18 August 2015 Revised: Online: Published: 01 April 1996

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      Article Navigation >  Journal of Semiconductors  > 1996  >  17(4): 313-317
      朱长纯，关辉，李天英. 真空微电子器件的栅极制造技术[J]. 半导体学报(英文版), 1996, 17(4): 313-317.
      Citation:
      朱长纯，关辉，李天英. 真空微电子器件的栅极制造技术[J]. 半导体学报(英文版), 1996, 17(4): 313-317.
      shu

      • Received Date: 2015-08-18

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