Citation: |
邹泉波,刘理天,李志坚. 纹膜结构用于电容式硅微麦克风的研究[J]. 半导体学报(英文版), 1996, 17(12): 907-913.
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Received: 18 August 2015 Revised: Online: Published: 01 December 1996
Citation: |
邹泉波,刘理天,李志坚. 纹膜结构用于电容式硅微麦克风的研究[J]. 半导体学报(英文版), 1996, 17(12): 907-913.
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