| Citation: |
Liu Xiang, Li Tie, Ming Anjie, Wang Yuelin. A compressed wide period-tunable grating working at low voltage[J]. Journal of Semiconductors, 2010, 31(10): 104010. doi: 10.1088/1674-4926/31/10/104010
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Liu X, Li T, Ming A J, Wang Y L. A compressed wide period-tunable grating working at low voltage[J]. J. Semicond., 2010, 31(10): 104010. doi: 10.1088/1674-4926/31/10/104010.
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A compressed wide period-tunable grating working at low voltage
doi: 10.1088/1674-4926/31/10/104010
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Abstract
A MEMS compressed period-tunable grating device with a wide tuning range has been designed, fabricated and characterized. To increase the tuning range, avoid instability with tuning and improve the performance, we propose in this paper a period-tunable grating which is compressed by large-displacement comb actuators with tilted folded beams. The experimental results show that the designed grating device has a compression range of up to 144 μm within 37 V driving voltage. The period of the grating can be adjusted continuously from 16 to 14 μm with a tuning range of 12.5%. The maximum tuning range of the first-order diffraction angle is 0.34o at 632.8 nm and the reflectivity of the grating is more than 92.6% in the mid-infrared region. The grating device can be fabricated by simple processes and finds applications in mid-infrared spectrometers. -
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