J. Semicond. > 2010, Volume 31 > Issue 8 > 082002

SEMICONDUCTOR PHYSICS

Young's modulus characterization of low-k films of nanoporous Black DiamondTM by surface acoustic waves

Shan Xingmeng, Xiao Xia and Liu Yaliang

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DOI: 10.1088/1674-4926/31/8/082002

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Abstract: The laser-generated surface acoustic wave (SAW) technique is an accurate, fast and nondestructive solution to determine the mechanical properties of ultra thin films. SAWs are dispersive during the wave propagation on the layered structure. The Young's moduli of thin films can be obtained by matching the experimentally and theoretically calculated dispersive SAW curves. A short ultraviolet laser pulse is employed to generate the broad spectral range of the dispersive SAWs. The frequency range of dispersive SAWs in this study reaches 180 MHz, which is adequate for the SAW technique applied for the investigated samples. In this work, the Young's moduli of a series of nanoporous Black DiamondTM low dielectric constant (low-k) films deposited on a Si (100) substrate are characterized successfully by the SAW technique.

Key words: ULSI interconnectSAWsYoung's modulusBlack DiamondmTMnanoporous low-k film

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    Received: 18 August 2015 Revised: 14 April 2010 Online: Published: 01 August 2010

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      Shan Xingmeng, Xiao Xia, Liu Yaliang. Young's modulus characterization of low-k films of nanoporous Black DiamondTM by surface acoustic waves[J]. Journal of Semiconductors, 2010, 31(8): 082002. doi: 10.1088/1674-4926/31/8/082002 ****Shan X M, Xiao X, Liu Y L. Young\'s modulus characterization of low-k films of nanoporous Black DiamondTM by surface acoustic waves[J]. J. Semicond., 2010, 31(8): 082002. doi: 10.1088/1674-4926/31/8/082002.
      Citation:
      Shan Xingmeng, Xiao Xia, Liu Yaliang. Young's modulus characterization of low-k films of nanoporous Black DiamondTM by surface acoustic waves[J]. Journal of Semiconductors, 2010, 31(8): 082002. doi: 10.1088/1674-4926/31/8/082002 ****
      Shan X M, Xiao X, Liu Y L. Young\'s modulus characterization of low-k films of nanoporous Black DiamondTM by surface acoustic waves[J]. J. Semicond., 2010, 31(8): 082002. doi: 10.1088/1674-4926/31/8/082002.

      Young's modulus characterization of low-k films of nanoporous Black DiamondTM by surface acoustic waves

      DOI: 10.1088/1674-4926/31/8/082002
      • Received Date: 2015-08-18
      • Accepted Date: 2010-02-22
      • Revised Date: 2010-04-14
      • Published Date: 2010-07-31

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