Abstract: A closed-form model for the frequency-dependent per-unit-length resistance of trapezoidal cross-sectional interconnects is presented. The frequency-dependent per-unit-length resistance R(f) of a trapezoidal interconnect line is first obtained by a numerical method. Using the method we quantify the trapezoid edge effect on the resistance of the interconnect and the current density distribution in the cross section. Based on this strict numerical result, a novel closed-form model R(f) for a single trapezoidal interconnect is fitted out using the Levenberg–Marquardt method. This R(f) can be widely used for analyzing on-chip interconnects when the frequency is changing. The model is computationally very efficient with respect to the numerical method, and the results are found to be accurate.

Key words: interconnect, resistance, Levenberg–Marquardt method