J. Semicond. > 2011, Volume 32 > Issue 3 > 034006

SEMICONDUCTOR DEVICES

Novel capacitance-type humidity sensor based on multi-wall carbon nanotube/SiO2 composite films

Liu Xiaowei, Zhao Zhengang, Li Tuo and Wang Xin

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DOI: 10.1088/1674-4926/32/3/034006

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Abstract: A novel capacitance-type relative humidity (RH) sensor based on multi-wall carbon nanotube/SiO2 (MWCNTs/SiO2) composite film is reported. Details of the fabrication process, possible sensing mechanism and sensing characteristics, such as linearity and sensitivity, are described. The capacitance of the MWCNTs/SiO2 composite film shows typical concentration percolation behavior with increasing MWCNT loading. At loadings below the percolation threshold (1.842wt%), the sensor capacitance increases obviously with increasing MWCNTs. The water condensed in the MWCNTs/SiO2 layer can lower the percolation threshold and increase the sensor capacitance. The sensor with MWCNT concentration of 1wt% has the best properties. The sensor has a humidity sensitivity of about 673 pF/% RH and a linearity correlation of 0.98428. The response time of the sensor to RH is about 40 s and the recovery time is about 2 s.

Key words: carbon nanotubeshumidity sensorpercolation thresholdcapacitance-type

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    Received: 18 August 2015 Revised: 21 September 2010 Online: Published: 01 March 2011

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      Liu Xiaowei, Zhao Zhengang, Li Tuo, Wang Xin. Novel capacitance-type humidity sensor based on multi-wall carbon nanotube/SiO2 composite films[J]. Journal of Semiconductors, 2011, 32(3): 034006. doi: 10.1088/1674-4926/32/3/034006 ****Liu X W, Zhao Z G, Li T, Wang X. Novel capacitance-type humidity sensor based on multi-wall carbon nanotube/SiO2 composite films[J]. J. Semicond., 2011, 32(3): 034006. doi: 10.1088/1674-4926/32/3/034006.
      Citation:
      Liu Xiaowei, Zhao Zhengang, Li Tuo, Wang Xin. Novel capacitance-type humidity sensor based on multi-wall carbon nanotube/SiO2 composite films[J]. Journal of Semiconductors, 2011, 32(3): 034006. doi: 10.1088/1674-4926/32/3/034006 ****
      Liu X W, Zhao Z G, Li T, Wang X. Novel capacitance-type humidity sensor based on multi-wall carbon nanotube/SiO2 composite films[J]. J. Semicond., 2011, 32(3): 034006. doi: 10.1088/1674-4926/32/3/034006.

      Novel capacitance-type humidity sensor based on multi-wall carbon nanotube/SiO2 composite films

      DOI: 10.1088/1674-4926/32/3/034006
      • Received Date: 2015-08-18
      • Accepted Date: 2010-08-25
      • Revised Date: 2010-09-21
      • Published Date: 2011-02-23

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