| Citation: |
Zhang Zuwei, Wen Zhiyu, Hu Jing. Theoretical analysis and concept demonstration of a novel MOEMS accelerometer based on Raman-Nath diffraction[J]. Journal of Semiconductors, 2012, 33(4): 044005. doi: 10.1088/1674-4926/33/4/044005
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Zhang Z W, Wen Z Y, Hu J. Theoretical analysis and concept demonstration of a novel MOEMS accelerometer based on Raman-Nath diffraction[J]. J. Semicond., 2012, 33(4): 044005. doi: 10.1088/1674-4926/33/4/044005.
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Theoretical analysis and concept demonstration of a novel MOEMS accelerometer based on Raman-Nath diffraction
DOI: 10.1088/1674-4926/33/4/044005
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Abstract
The design and simulation of a novel microoptoelectromechanical system (MOEMS) accelerometer based on Raman-Nath diffraction are presented. The device is planned to be fabricated by microelectromechanical system technology and has a different sensing principle than the other reported MOEMS accelerometers. The fundamental theories and principles of the device are discussed in detail, a 3D finite element simulation of the flexural plate wave delay line oscillator is provided, and the operation frequency around 40 MHz is calculated. Finally, a lecture experiment is performed to demonstrate the feasibility of the device. This novel accelerometer is proposed to have the advantages of high sensitivity and anti-radiation, and has great potential for various applications.-
Keywords:
- accelerometer
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References
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