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Han Weiqing, Zhou Gang, Wang Lianjun, Sun Xiuyun, Li Jiansheng. Fabrication of Tin Oxide Porous Nanostructures on Titanium by Anodization and Electroplating[J]. Journal of Semiconductors, 2006, 27(12): 2134-2138.
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Han W Q, Zhou G, Wang L J, Sun X Y, Li J S. Fabrication of Tin Oxide Porous Nanostructures on Titanium by Anodization and Electroplating[J]. Chin. J. Semicond., 2006, 27(12): 2134.
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Fabrication of Tin Oxide Porous Nanostructures on Titanium by Anodization and Electroplating
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Abstract
A tin dioxide nanotube is fabricated on titanium by anodization and electroplating.First,a nickel film is deposited on 3mm-thick titanium.Then a 1μm-thick tin layer is deposited thereon by electroplating.The wafer is anodized for 5min in 0.5mol/L oxalic acid solution,at constant DC 5V at room temperature.After the anodization,to enlarge the pore size and remove the barrier layer,the anodized specimens are immersed in a 1.0mol/L oxalic acid solution for 15min at 80℃.The obtained samples are examined by scanning electron microscopy,EDS,and X-ray diffraction.The results indicate that a layer of nano-pore arrays of tin oxidation,whose thickness is about 1μm,formed on the titanium.The pore diameter is 70nm.The distance between two adjacent pores is 80nm.The sample is heated to 500℃ for 2h to fabricate SnO2 compound and is used for the fabrication of composite coating on titanium also.-
Keywords:
- anodization,
- tin dioxide coating on titanium,
- nanotube
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References
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Proportional views