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高玉芝, 夏宗璜, 武国英, 张利春, 黄济群, 张德贤. 空心阴极离子淀积TiN薄膜特性研究[J]. 半导体学报(英文版), 1989, 10(7): 503-508.
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Received: 19 August 2015 Revised: Online: Published: 01 July 1989
Citation: |
高玉芝, 夏宗璜, 武国英, 张利春, 黄济群, 张德贤. 空心阴极离子淀积TiN薄膜特性研究[J]. 半导体学报(英文版), 1989, 10(7): 503-508.
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