Citation: |
李观启,黄美浅,曾绍鸿,曾旭. Ar~+背面轰击对SiO_xN_y栅介质的n-MOSFET迁移率和跨导的影响[J]. 半导体学报(英文版), 1996, 17(10): 775-779.
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Received: 18 August 2015 Revised: Online: Published: 01 October 1996
Citation: |
李观启,黄美浅,曾绍鸿,曾旭. Ar~+背面轰击对SiO_xN_y栅介质的n-MOSFET迁移率和跨导的影响[J]. 半导体学报(英文版), 1996, 17(10): 775-779.
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