Chin. J. Semicond. > 2004, Volume 25 > Issue 4 > 430-435
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在线检测多晶硅薄膜热导率测试结构的设计与模拟

许高斌 and 黄庆安

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Key words: 热导率, 表面微机械技术, 测试结构, 多晶硅薄膜

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    Received: 19 August 2015 Revised: Online: Published: 01 April 2004

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      Article Navigation >  Journal of Semiconductors  > 2004  >  25(4): 430-435
      许高斌, 黄庆安. 在线检测多晶硅薄膜热导率测试结构的设计与模拟[J]. 半导体学报(英文版), 2004, 25(4): 430-435.
      Citation:
      许高斌, 黄庆安. 在线检测多晶硅薄膜热导率测试结构的设计与模拟[J]. 半导体学报(英文版), 2004, 25(4): 430-435.
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      • Received Date: 2015-08-19

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