Chin. J. Semicond. > 1992, Volume 13 > Issue 1 > 36-41
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Ar~+激光结晶非晶硅膜电学性质研究

张向东 , 黄信凡 and 陈坤基

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    Received: 19 August 2015 Revised: Online: Published: 01 January 1992

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      Article Navigation >  Journal of Semiconductors  > 1992  >  13(1): 36-41
      张向东, 黄信凡, 陈坤基. Ar~+激光结晶非晶硅膜电学性质研究[J]. 半导体学报(英文版), 1992, 13(1): 36-41.
      Citation:
      张向东, 黄信凡, 陈坤基. Ar~+激光结晶非晶硅膜电学性质研究[J]. 半导体学报(英文版), 1992, 13(1): 36-41.
      shu

      • Received Date: 2015-08-19

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