Chin. J. Semicond. > 2001, Volume 22 > Issue 7 > 951-956

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纹膜结构微麦克风的动态特性:使用EDA/CAD工具进行Top-down设计

陈兢 , 刘理天 and 李志坚

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Key words: MEMS, CAD, 动态特性, 微麦克风, 纹膜

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    Received: 20 August 2015 Revised: Online: Published: 01 July 2001

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      Article Navigation >  Journal of Semiconductors  > 2001  >  22(7): 951-956
      陈兢, 刘理天, 李志坚. 纹膜结构微麦克风的动态特性:使用EDA/CAD工具进行Top-down设计[J]. 半导体学报(英文版), 2001, 22(7): 951-956.
      Citation:
      陈兢, 刘理天, 李志坚. 纹膜结构微麦克风的动态特性:使用EDA/CAD工具进行Top-down设计[J]. 半导体学报(英文版), 2001, 22(7): 951-956.
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      • Received Date: 2015-08-20

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