Chin. J. Semicond. > 1989, Volume 10 > Issue 7 > 534-537
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用Raman光谱研究掺氧多晶硅的微结构

王云珍 and 潘尧令

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    Received: 19 August 2015 Revised: Online: Published: 01 July 1989

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      Article Navigation >  Journal of Semiconductors  > 1989  >  10(7): 534-537
      王云珍, 潘尧令. 用Raman光谱研究掺氧多晶硅的微结构[J]. 半导体学报(英文版), 1989, 10(7): 534-537.
      Citation:
      王云珍, 潘尧令. 用Raman光谱研究掺氧多晶硅的微结构[J]. 半导体学报(英文版), 1989, 10(7): 534-537.
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      • Received Date: 2015-08-19

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