Chin. J. Semicond. > 2001, Volume 22 > Issue 10 > 1284-1286
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重掺硅中氧的测定

刘培东 , 黄笑容 , 沈益军 , 李立本 and 阙端麟

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Key words: 硅中氧, 气体熔化分析法, 红外光谱

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    Received: 20 August 2015 Revised: Online: Published: 01 October 2001

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      Article Navigation >  Journal of Semiconductors  > 2001  >  22(10): 1284-1286
      刘培东, 黄笑容, 沈益军, 李立本, 阙端麟. 重掺硅中氧的测定[J]. 半导体学报(英文版), 2001, 22(10): 1284-1286.
      Citation:
      刘培东, 黄笑容, 沈益军, 李立本, 阙端麟. 重掺硅中氧的测定[J]. 半导体学报(英文版), 2001, 22(10): 1284-1286.
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      • Received Date: 2015-08-20

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