Abstract: P-type ZnMgO films grown on glass substrates with Li-doped by pulsed laser deposition.The films have good crystallinity with a(0002)preferential orientation.The substrate temperature exert a remarkable influence oil electrical properties and crystal qualities of Li-doped films.Results indicated that Li-doped ZnMgO film possesses a best crystallinity at the substrate temperature of 500℃.The Li.doped p-type ZnMgO have the lowest resistivity of 6.58Ω·cm，and carrier density up to 5.1 x 10^18cm-3 and Hall mobility 0.189cm2/(V·s).In addition，the Li-doped P.type ZnMgO film has a high transmit. tance about 90％in the visible region and a band gap of 3.625eV at room temperature.

Key words: Li-doped ZnMgO films, pulsed laser deposition, p-type conduction