Chin. J. Semicond. > 1994, Volume 15 > Issue 6 > 422-428
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微氮硅单晶中氧沉滨

杨德仁，姚鸿年，阙端麟

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    Received: 18 August 2015 Revised: Online: Published: 01 June 1994

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      Article Navigation >  Journal of Semiconductors  > 1994  >  15(6): 422-428
      杨德仁，姚鸿年，阙端麟. 微氮硅单晶中氧沉滨[J]. 半导体学报(英文版), 1994, 15(6): 422-428.
      Citation:
      杨德仁，姚鸿年，阙端麟. 微氮硅单晶中氧沉滨[J]. 半导体学报(英文版), 1994, 15(6): 422-428.
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      • Received Date: 2015-08-18

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