Chin. J. Semicond. > 2003, Volume 24 > Issue 6 > 631-636
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压控式毫米波MEMS移相器的可动薄膜

郭方敏 , 朱自强 , 赖宗声 , 朱守正 , 朱荣锦 , 忻佩胜 , 范忠 , 贾铭 , 程知群 and 杨根庆

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Key words: RFMEMS开关, 移相器, 下拉电压, 铝硅合金

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    Received: 20 August 2015 Revised: Online: Published: 01 June 2003

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      Article Navigation >  Journal of Semiconductors  > 2003  >  24(6): 631-636
      郭方敏, 朱自强, 赖宗声, 朱守正, 朱荣锦, 忻佩胜, 范忠, 贾铭, 程知群, 杨根庆. 压控式毫米波MEMS移相器的可动薄膜[J]. 半导体学报(英文版), 2003, 24(6): 631-636.
      Citation:
      郭方敏, 朱自强, 赖宗声, 朱守正, 朱荣锦, 忻佩胜, 范忠, 贾铭, 程知群, 杨根庆. 压控式毫米波MEMS移相器的可动薄膜[J]. 半导体学报(英文版), 2003, 24(6): 631-636.
      shu

      • Received Date: 2015-08-20

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