Chin. J. Semicond. > 2004, Volume 25 > Issue 12 > 1606-1611
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基于阳极键合干法刻蚀技术的MEMS隧道加速度计的加工及测试(英文)

董海峰 , 郝一龙 , 贾玉斌 , 闫桂珍 , 王颖 and 李婷

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Key words: 隧道效应, 加速度计, 微机电系统

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    Received: 19 August 2015 Revised: Online: Published: 01 December 2004

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      Article Navigation >  Journal of Semiconductors  > 2004  >  25(12): 1606-1611
      董海峰, 郝一龙, 贾玉斌, 闫桂珍, 王颖, 李婷. 基于阳极键合干法刻蚀技术的MEMS隧道加速度计的加工及测试(英文)[J]. 半导体学报(英文版), 2004, 25(12): 1606-1611.
      Citation:
      董海峰, 郝一龙, 贾玉斌, 闫桂珍, 王颖, 李婷. 基于阳极键合干法刻蚀技术的MEMS隧道加速度计的加工及测试(英文)[J]. 半导体学报(英文版), 2004, 25(12): 1606-1611.
      shu

      • Received Date: 2015-08-19

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