Chin. J. Semicond. > 2005, Volume 26 > Issue 12 > 2294-2297

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A New Process for Improving Performance of VCSELs

Ren Bingyan, Gou Xianfang, Ma Lifen, Li Xudong, Xu Ying and Wang Wenjing

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Abstract: Oxygen and carbon behaviors and minority-carrier lifetimes in multi-crystalline silicon (mc-Si) used for solar cells are investigated by FTIR and QSSPCD before and after annealing at 750~1150℃ in N2 and O2 ambient.For comparison,the annealing of CZ silicon with nearly the same oxygen and carbon concentrations is also carried out under the same conditions.The results reveal that the oxygen and carbon concentrations of mc-Si and CZ-Si have a lesser decrease,which means oxygen precipitates are not generated,and grain boundaries in mc-Si do not affect carbon behavior.Bulk lifetime of mc-Si increases in N2 and O2 ambient at 850,950,and 1150℃,and the lifetime of mc-Si wafers annealed in O2 are higher than those annealed in N2,which shows that a lot of impurities in mc-Si at high temperature annealing diffuse to grain boundaries,greatly reducing recombination centers.Interstitial Si atoms filling vacancies or recombination centers increases lifetime.

Key words: polycrystalline siliconoxygenlifetime

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    Received: 19 August 2015 Revised: Online: Published: 01 December 2005

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      Ren Bingyan, Gou Xianfang, Ma Lifen, Li Xudong, Xu Ying, Wang Wenjing. A New Process for Improving Performance of VCSELs[J]. Journal of Semiconductors, 2005, 26(12): 2294-2297. ****Ren B Y, Gou X F, Ma L F, Li X D, Xu Y, Wang W J. A New Process for Improving Performance of VCSELs[J]. Chin. J. Semicond., 2005, 26(12): 2294.
      Citation:
      Ren Bingyan, Gou Xianfang, Ma Lifen, Li Xudong, Xu Ying, Wang Wenjing. A New Process for Improving Performance of VCSELs[J]. Journal of Semiconductors, 2005, 26(12): 2294-2297. ****
      Ren B Y, Gou X F, Ma L F, Li X D, Xu Y, Wang W J. A New Process for Improving Performance of VCSELs[J]. Chin. J. Semicond., 2005, 26(12): 2294.

      A New Process for Improving Performance of VCSELs

      • Received Date: 2015-08-19

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