Chin. J. Semicond. > 2005, Volume 26 > Issue 9 > 1773-1777

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Key words: 碲锌镉位错腐蚀坑密度

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    Received: 18 August 2015 Revised: Online: Published: 01 September 2005

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      刘从峰, 方维政, 涂步华, 孙士文, 杨建荣. (111)晶向碲锌镉晶片双面腐蚀的对比[J]. 半导体学报(英文版), 2005, 26(9): 1773-1777.
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      刘从峰, 方维政, 涂步华, 孙士文, 杨建荣. (111)晶向碲锌镉晶片双面腐蚀的对比[J]. 半导体学报(英文版), 2005, 26(9): 1773-1777.

      • Received Date: 2015-08-18

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