Chin. J. Semicond. > 1988, Volume 9 > Issue 3 > 318-320
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Al-Si接触的快速热退火

陈存礼 , 彭辉 and 李联珠

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    Received: 19 August 2015 Revised: Online: Published: 01 March 1988

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      Article Navigation >  Journal of Semiconductors  > 1988  >  9(3): 318-320
      陈存礼, 彭辉, 李联珠. Al-Si接触的快速热退火[J]. 半导体学报(英文版), 1988, 9(3): 318-320.
      Citation:
      陈存礼, 彭辉, 李联珠. Al-Si接触的快速热退火[J]. 半导体学报(英文版), 1988, 9(3): 318-320.
      shu

      • Received Date: 2015-08-19

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