Chin. J. Semicond. > 2002, Volume 23 > Issue 6 > 599-603
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有机衬底SnO_2∶Sb透明导电膜的研究

马瑾 , 郝晓涛 , 马洪磊 , 张德恒 and 徐现刚

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Key words: 有机衬底, SnO2∶Sb膜, 磁控溅射

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    Received: 19 August 2015 Revised: Online: Published: 01 June 2002

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      Article Navigation >  Journal of Semiconductors  > 2002  >  23(6): 599-603
      马瑾, 郝晓涛, 马洪磊, 张德恒, 徐现刚. 有机衬底SnO_2∶Sb透明导电膜的研究[J]. 半导体学报(英文版), 2002, 23(6): 599-603.
      Citation:
      马瑾, 郝晓涛, 马洪磊, 张德恒, 徐现刚. 有机衬底SnO_2∶Sb透明导电膜的研究[J]. 半导体学报(英文版), 2002, 23(6): 599-603.
      shu

      • Received Date: 2015-08-19

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