Chin. J. Semicond. > 1983, Volume 4 > Issue 1 > 56-63
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离子注入硅片的CWCO_2激光退火固相外延模型

沈金萱 and 屈逢源

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    Received: 20 August 2015 Revised: Online: Published: 01 January 1983

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      Article Navigation >  Journal of Semiconductors  > 1983  >  4(1): 56-63
      沈金萱, 屈逢源. 离子注入硅片的CWCO_2激光退火固相外延模型[J]. 半导体学报(英文版), 1983, 4(1): 56-63.
      Citation:
      沈金萱, 屈逢源. 离子注入硅片的CWCO_2激光退火固相外延模型[J]. 半导体学报(英文版), 1983, 4(1): 56-63.
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      • Received Date: 2015-08-20

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