Chin. J. Semicond. > 1999, Volume 20 > Issue 11 > 952-956
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LICVD法制备a-Si_3N_4纳米粒子光谱研究

凤雷 , 郑韬 and 李道火

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    Received: 19 August 2015 Revised: Online: Published: 01 November 1999

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      Article Navigation >  Journal of Semiconductors  > 1999  >  20(11): 952-956
      凤雷, 郑韬, 李道火. LICVD法制备a-Si_3N_4纳米粒子光谱研究[J]. 半导体学报(英文版), 1999, 20(11): 952-956.
      Citation:
      凤雷, 郑韬, 李道火. LICVD法制备a-Si_3N_4纳米粒子光谱研究[J]. 半导体学报(英文版), 1999, 20(11): 952-956.
      shu

      • Received Date: 2015-08-19

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