| Citation: |
Chen Xinliang, Xue Junming, Sun Jian, Zhao Ying, Geng Xinhua. Growth of Textured ZnO Thin Films and Their Front Electrodes for Application in Solar Cells[J]. Journal of Semiconductors, 2007, 28(7): 1072-1077.
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Chen X L, Xue J M, Sun J, Zhao Y, Geng X H. Growth of Textured ZnO Thin Films and Their Front Electrodes for Application in Solar Cells[J]. Chin. J. Semicond., 2007, 28(7): 1072.
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Growth of Textured ZnO Thin Films and Their Front Electrodes for Application in Solar Cells
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Abstract
The structural,optical,and electrical properties of ZnO thin films grown by metal organic chemical vapor deposition at different B2H6 flow rates were investigated.XRD spectra and SEM images indicate that all the ZnO films have the preferential orientation of (110) peak,showing textured surfaces.When the B2H6 flow rate was set at 10sccm,a low sheet resistance (12Ω/□) and high average transparency (＞80%) in the range of visible light and infrared and 30.5cm2/(V·s) mobility were obtained for 1000nm thick ZnO film deposited on 6cm×6cm glass substrate at a low temperature of 423K.PL spectra indicate that boron-doping improves the crystal quality,which explains why the ZnO:B films show a better electrical stability than the un-doped samples.Low-pressure annealing in H2 atmosphere at 473K of ZnO films effectively enhances the electron mobility.When applied in a-Si thin film solar cells as front electrodes,ZnO films present equivalent performance to Asahi-U type SnO2 films-
Keywords:
- MOCVD,
- textured ZnO film,
- B-doping,
- front electrodes,
- solar cells
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References
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Proportional views
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