Chin. J. Semicond. > 1997, Volume 18 > Issue 11 > 867-871
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用于GaN生长的蓝宝石衬底化学抛光研究

王晓晖 , 刘祥林 , 江度 and 陆大成

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    Received: 19 August 2015 Revised: Online: Published: 01 November 1997

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      Article Navigation >  Journal of Semiconductors  > 1997  >  18(11): 867-871
      王晓晖, 刘祥林, 江度, 陆大成. 用于GaN生长的蓝宝石衬底化学抛光研究[J]. 半导体学报(英文版), 1997, 18(11): 867-871.
      Citation:
      王晓晖, 刘祥林, 江度, 陆大成. 用于GaN生长的蓝宝石衬底化学抛光研究[J]. 半导体学报(英文版), 1997, 18(11): 867-871.
      shu

      • Received Date: 2015-08-19

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