Chin. J. Semicond. > 2001, Volume 22 > Issue 8 > 1015-1018
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直流磁控溅射ZnO薄膜的结构和室温PL谱

叶志镇 , 陈汉鸿 , 刘榕 , 张昊翔 and 赵炳辉

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Key words: ZnO薄膜, 磁控溅射, 光致发光光谱

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    Received: 20 August 2015 Revised: Online: Published: 01 August 2001

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      Article Navigation >  Journal of Semiconductors  > 2001  >  22(8): 1015-1018
      叶志镇, 陈汉鸿, 刘榕, 张昊翔, 赵炳辉. 直流磁控溅射ZnO薄膜的结构和室温PL谱[J]. 半导体学报(英文版), 2001, 22(8): 1015-1018.
      Citation:
      叶志镇, 陈汉鸿, 刘榕, 张昊翔, 赵炳辉. 直流磁控溅射ZnO薄膜的结构和室温PL谱[J]. 半导体学报(英文版), 2001, 22(8): 1015-1018.
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      • Received Date: 2015-08-20

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