Chin. J. Semicond. > 1983, Volume 4 > Issue 2 > 149-153

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用硅烷和乙烯辉光放电法制备的a-Si_xC_(1-x):H薄膜及光电性能的研究

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陈光华, 张仿清, 杜宁, 徐希翔, 黄士生, 刘智. 用硅烷和乙烯辉光放电法制备的a-Si_xC_(1-x):H薄膜及光电性能的研究[J]. 半导体学报(英文版), 1983, 4(2): 149-153.

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Received: 20 August 2015 Revised: Online: Published: 01 February 1983

Article Navigation > Journal of Semiconductors > 1983 > 4(2): 149-153

陈光华, 张仿清, 杜宁, 徐希翔, 黄士生, 刘智. 用硅烷和乙烯辉光放电法制备的a-Si_xC_(1-x):H薄膜及光电性能的研究[J]. 半导体学报(英文版), 1983, 4(2): 149-153.

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