Chin. J. Semicond. > 2002, Volume 23 > Issue 11 > 1196-1200
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硅基二氧化硅波导的应力和偏振相关性的数值分析

邓晓清 , 杨沁清 , 王红杰 , 胡雄伟 and 王启明

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Key words: 有限元, 应力, 硅基二氧化硅波导, 双折射效应

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    Received: 19 August 2015 Revised: Online: Published: 01 November 2002

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      Article Navigation >  Journal of Semiconductors  > 2002  >  23(11): 1196-1200
      邓晓清, 杨沁清, 王红杰, 胡雄伟, 王启明. 硅基二氧化硅波导的应力和偏振相关性的数值分析[J]. 半导体学报(英文版), 2002, 23(11): 1196-1200.
      Citation:
      邓晓清, 杨沁清, 王红杰, 胡雄伟, 王启明. 硅基二氧化硅波导的应力和偏振相关性的数值分析[J]. 半导体学报(英文版), 2002, 23(11): 1196-1200.
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      • Received Date: 2015-08-19

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