Chin. J. Semicond. > 1986, Volume 7 > Issue 6 > 602-607

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    Received: 20 August 2015 Revised: Online: Published: 01 June 1986

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      汤广平, 刘明登, 全宝富, 赵慕愚. SiCl_4-SiH_4-H_2混合源的硅外延生长[J]. 半导体学报(英文版), 1986, 7(6): 602-607.
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      汤广平, 刘明登, 全宝富, 赵慕愚. SiCl_4-SiH_4-H_2混合源的硅外延生长[J]. 半导体学报(英文版), 1986, 7(6): 602-607.

      • Received Date: 2015-08-20

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