| Citation: |
Luo Tianxing, Shi Yanling, Ding Yanfang, Tang Shenqun, Liu Yun, Wang Yong, Zhu Jun, Chen Shoumian, Zhao Yuhang. An Accurate Arithmetic for On-Chip Spiral Inductors with Gradually Changed Metal Width and Space[J]. Journal of Semiconductors, 2006, 27(9): 1616-1620.
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Luo T X, Shi Y L, Ding Y F, Tang S Q, Liu Y, Wang Y, Zhu J, Chen S M, Zhao Y H. An Accurate Arithmetic for On-Chip Spiral Inductors with Gradually Changed Metal Width and Space[J]. Chin. J. Semicond., 2006, 27(9): 1616.
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An Accurate Arithmetic for On-Chip Spiral Inductors with Gradually Changed Metal Width and Space
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Abstract
Compared with conventional passive inductors with fixed metal width and space,an inductor with gradually changed mental width and space is put forward to improve its quality factor.But it is difficult to get accurate inductance with most published formulas such as Jenei formula for such novel structure inductor.An accurate arithmetic is presented,which gets total self-inductance by adding up each turn’s self-inductance and gets mutual-inductance from an average approximate formula.The accuracy and effectiveness are verified by HFSS simulation and experiment measurement.The relative error for this arithmetic compared with HFSS is less than 3%,while compared with experiment measurements less than 4%.These show that it is efficient and valuable for the design of such passive spiral inductor. -
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