Chin. J. Semicond. > 1985, Volume 6 > Issue 1 > 107-112

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用离子束混合形成硅化钛

胡仁元

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    Received: 20 August 2015 Revised: Online: Published: 01 January 1985

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      Article Navigation >  Journal of Semiconductors  > 1985  >  6(1): 107-112
      胡仁元. 用离子束混合形成硅化钛[J]. 半导体学报(英文版), 1985, 6(1): 107-112.
      Citation:
      胡仁元. 用离子束混合形成硅化钛[J]. 半导体学报(英文版), 1985, 6(1): 107-112.
      shu

      • Received Date: 2015-08-20

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