Chin. J. Semicond. > 1991, Volume 12 > Issue 5 > 289-293
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用分子束外延在多孔硅衬底上外延单晶硅来实现SOI结构

周国良 , 盛篪 , 樊永良 , 张翔九 , 俞鸣人 and 黄宜平

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    Received: 19 August 2015 Revised: Online: Published: 01 May 1991

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      Article Navigation >  Journal of Semiconductors  > 1991  >  12(5): 289-293
      周国良, 盛篪, 樊永良, 张翔九, 俞鸣人, 黄宜平. 用分子束外延在多孔硅衬底上外延单晶硅来实现SOI结构[J]. 半导体学报(英文版), 1991, 12(5): 289-293.
      Citation:
      周国良, 盛篪, 樊永良, 张翔九, 俞鸣人, 黄宜平. 用分子束外延在多孔硅衬底上外延单晶硅来实现SOI结构[J]. 半导体学报(英文版), 1991, 12(5): 289-293.
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      • Received Date: 2015-08-19

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