Chin. J. Semicond. > 1998, Volume 19 > Issue 10 > 784-787
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含F栅介质的击穿特性研究

张国强 , 郭旗 , 余学锋 , 任迪远 and 严荣良

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    Received: 18 August 2015 Revised: Online: Published: 01 October 1998

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      Article Navigation >  Journal of Semiconductors  > 1998  >  19(10): 784-787
      张国强, 郭旗, 余学锋, 任迪远, 严荣良. 含F栅介质的击穿特性研究[J]. 半导体学报(英文版), 1998, 19(10): 784-787.
      Citation:
      张国强, 郭旗, 余学锋, 任迪远, 严荣良. 含F栅介质的击穿特性研究[J]. 半导体学报(英文版), 1998, 19(10): 784-787.
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      • Received Date: 2015-08-18

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