Chin. J. Semicond. > 1984, Volume 5 > Issue 4 > 353-359
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a-Si:(Cl,H)薄膜的PESIS研究

邢益荣 , 钟战天 and 沈光地

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    Received: 20 August 2015 Revised: Online: Published: 01 April 1984

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      Article Navigation >  Journal of Semiconductors  > 1984  >  5(4): 353-359
      邢益荣, 钟战天, 沈光地. a-Si:(Cl,H)薄膜的PESIS研究[J]. 半导体学报(英文版), 1984, 5(4): 353-359.
      Citation:
      邢益荣, 钟战天, 沈光地. a-Si:(Cl,H)薄膜的PESIS研究[J]. 半导体学报(英文版), 1984, 5(4): 353-359.
      shu

      • Received Date: 2015-08-20

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