Chin. J. Semicond. > 2001, Volume 22 > Issue 2 > 208-213
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一种新的求解ULSI双介质互连电容的模拟电荷法

朱兆旻 , 肖夏 , 阮刚 , 宋任儒 and 刘勇

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Key words: 格林函数法, 模拟电荷法, 互连电容

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    Received: 19 August 2015 Revised: Online: Published: 01 February 2001

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      Article Navigation >  Journal of Semiconductors  > 2001  >  22(2): 208-213
      朱兆旻, 肖夏, 阮刚, 宋任儒, 刘勇. 一种新的求解ULSI双介质互连电容的模拟电荷法[J]. 半导体学报(英文版), 2001, 22(2): 208-213.
      Citation:
      朱兆旻, 肖夏, 阮刚, 宋任儒, 刘勇. 一种新的求解ULSI双介质互连电容的模拟电荷法[J]. 半导体学报(英文版), 2001, 22(2): 208-213.
      shu

      • Received Date: 2015-08-19

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