Chin. J. Semicond. > 2004, Volume 25 > Issue 7 > 863-868
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硅基纳机电探针及其敏感和执行特性

杨尊先 , 李昕欣 , 王跃林 , 鲍海飞 , 刘民 and 陆德仁

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Key words: 悬臂梁-针尖探针, 纳机电系统技术, 压阻敏感, 电热纳米针尖, 数据存储技术

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    Received: 19 August 2015 Revised: Online: Published: 01 July 2004

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      Article Navigation >  Journal of Semiconductors  > 2004  >  25(7): 863-868
      杨尊先, 李昕欣, 王跃林, 鲍海飞, 刘民, 陆德仁. 硅基纳机电探针及其敏感和执行特性[J]. 半导体学报(英文版), 2004, 25(7): 863-868.
      Citation:
      杨尊先, 李昕欣, 王跃林, 鲍海飞, 刘民, 陆德仁. 硅基纳机电探针及其敏感和执行特性[J]. 半导体学报(英文版), 2004, 25(7): 863-868.
      shu

      • Received Date: 2015-08-19

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