Chin. J. Semicond. > 1987, Volume 8 > Issue 6 > 625-630
|

CONTENTS

Al-Mo-Ti-PtSi-Si金属化系统特性研究

陈正明 , 徐建良 , 罗晋生 and 沈文正

+ Author Affiliations

PDF

    • Search

    Advanced Search >>

    GET CITATION

    陈正明, 徐建良, 罗晋生, 沈文正. Al-Mo-Ti-PtSi-Si金属化系统特性研究[J]. 半导体学报(英文版), 1987, 8(6): 625-630.
    shu

    Export: BibTex EndNote

    Article Metrics

    Article views: 2424 Times PDF downloads: 1067 Times Cited by: 0 Times

    History

    Received: 19 August 2015 Revised: Online: Published: 01 June 1987

    Catalog

      Email This Article

      User name:
      Email:*请输入正确邮箱
      Code:*验证码错误
      Send
      Article Navigation >  Journal of Semiconductors  > 1987  >  8(6): 625-630
      陈正明, 徐建良, 罗晋生, 沈文正. Al-Mo-Ti-PtSi-Si金属化系统特性研究[J]. 半导体学报(英文版), 1987, 8(6): 625-630.
      Citation:
      陈正明, 徐建良, 罗晋生, 沈文正. Al-Mo-Ti-PtSi-Si金属化系统特性研究[J]. 半导体学报(英文版), 1987, 8(6): 625-630.
      shu

      • Received Date: 2015-08-19

      Catalog

        Journal of Semiconductors © 2017 All Rights Reserved   京ICP备05085259号-2

        /

        DownLoad:  Full-Size Img  PowerPoint
        Return
        Return