Chin. J. Semicond. > 1993, Volume 14 > Issue 8 > 509-512
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质量分离低能离子束外延超薄硅单晶的初步研究

黄大定 , 姚振钰 , 壬治璋 , 王向明 , 刘志凯 and 秦复光

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    Received: 20 August 2015 Revised: Online: Published: 01 August 1993

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      Article Navigation >  Journal of Semiconductors  > 1993  >  14(8): 509-512
      黄大定, 姚振钰, 壬治璋, 王向明, 刘志凯, 秦复光. 质量分离低能离子束外延超薄硅单晶的初步研究[J]. 半导体学报(英文版), 1993, 14(8): 509-512.
      Citation:
      黄大定, 姚振钰, 壬治璋, 王向明, 刘志凯, 秦复光. 质量分离低能离子束外延超薄硅单晶的初步研究[J]. 半导体学报(英文版), 1993, 14(8): 509-512.
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      • Received Date: 2015-08-20

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