Chin. J. Semicond. > 2004, Volume 25 > Issue 4 > 404-409
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硅衬底上PZT薄膜的制备及其特性分析

杨莺 , 陈治明 and 赵高扬

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Key words: 溶胶-凝胶, 锆钛酸铅, 钙钛矿相, 电滞回线

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    Received: 19 August 2015 Revised: Online: Published: 01 April 2004

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      Article Navigation >  Journal of Semiconductors  > 2004  >  25(4): 404-409
      杨莺, 陈治明, 赵高扬. 硅衬底上PZT薄膜的制备及其特性分析[J]. 半导体学报(英文版), 2004, 25(4): 404-409.
      Citation:
      杨莺, 陈治明, 赵高扬. 硅衬底上PZT薄膜的制备及其特性分析[J]. 半导体学报(英文版), 2004, 25(4): 404-409.
      shu

      • Received Date: 2015-08-19

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