Chin. J. Semicond. > 1985, Volume 6 > Issue 5 > 451-457

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硅及硅化钽超精细结构的刻蚀

李建中 , I.Adesida and E.D.Wolf

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    Received: 20 August 2015 Revised: Online: Published: 01 May 1985

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      Article Navigation >  Journal of Semiconductors  > 1985  >  6(5): 451-457
      李建中, I.Adesida, E.D.Wolf. 硅及硅化钽超精细结构的刻蚀[J]. 半导体学报(英文版), 1985, 6(5): 451-457.
      Citation:
      李建中, I.Adesida, E.D.Wolf. 硅及硅化钽超精细结构的刻蚀[J]. 半导体学报(英文版), 1985, 6(5): 451-457.
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      • Received Date: 2015-08-20

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