Chin. J. Semicond. > 2006, Volume 27 > Issue 9 > 1650-1656
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A Test System for the in situ Extraction of the Material Parameters of MEMS Thin Films

Huang Qing'an, Liu Zutao, Li Weihua and Li Qiaoping

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Abstract: A new system for thein situ extraction of the material parameters of MEMS films is presented. The system is composed of three parts,including the layout of testing structures,test equipments,and a software application for analysis and control.Both the test and measurement signals of the test system are electrical,making it compatible with IC testing and capable for rapid testing.The measurement is executed automatically under the control of a computer.

Key words: MEMS, film, material parameter, in situ

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    Received: 18 August 2015 Revised: 04 April 2006 Online: Published: 01 September 2006

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      Article Navigation >  Journal of Semiconductors  > 2006  >  27(9): 1650-1656
      Huang Qing'an, Liu Zutao, Li Weihua, Li Qiaoping. A Test System for the in situ Extraction of the Material Parameters of MEMS Thin Films[J]. Journal of Semiconductors, 2006, 27(9): 1650-1656. ****Huang Q, Liu Z T, Li W H, Li Q P. A Test System for the in situ Extraction of the Material Parameters of MEMS Thin Films[J]. Chin. J. Semicond., 2006, 27(9): 1650.
      Citation:
      Huang Qing'an, Liu Zutao, Li Weihua, Li Qiaoping. A Test System for the in situ Extraction of the Material Parameters of MEMS Thin Films[J]. Journal of Semiconductors, 2006, 27(9): 1650-1656. ****
      Huang Q, Liu Z T, Li W H, Li Q P. A Test System for the in situ Extraction of the Material Parameters of MEMS Thin Films[J]. Chin. J. Semicond., 2006, 27(9): 1650.
      shu

      A Test System for the in situ Extraction of the Material Parameters of MEMS Thin Films

      • Key Laboratory of MEMS of the Ministry of Education,Southeast University,Nanjing 210096,China

      • Key Laboratory of MEMS of the Ministry of Education,Southeast University,Nanjing 210096,China

      • Key Laboratory of MEMS of the Ministry of Education,Southeast University,Nanjing 210096,China

      • Key Laboratory of MEMS of the Ministry of Education,Southeast University,Nanjing 210096,China

      • Received Date: 2015-08-18
      • Accepted Date: 2006-02-05
      • Revised Date: 2006-04-04
      • Published Date: 2006-10-12

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