PAPERS
Abstract: A new system for thein situ extraction of the material parameters of MEMS films is presented. The system is composed of three parts,including the layout of testing structures,test equipments,and a software application for analysis and control.Both the test and measurement signals of the test system are electrical,making it compatible with IC testing and capable for rapid testing.The measurement is executed automatically under the control of a computer.
Key words: MEMS, film, material parameter, in situ
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| 17 |
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| 18 |
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| 19 |
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| 20 |
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Received: 18 August 2015 Revised: 04 April 2006 Online: Published: 01 September 2006
| Citation: |
Huang Qing'an, Liu Zutao, Li Weihua, Li Qiaoping. A Test System for the in situ Extraction of the Material Parameters of MEMS Thin Films[J]. Journal of Semiconductors, 2006, 27(9): 1650-1656.
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Huang Q, Liu Z T, Li W H, Li Q P. A Test System for the in situ Extraction of the Material Parameters of MEMS Thin Films[J]. Chin. J. Semicond., 2006, 27(9): 1650.
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